EFFECTS OF SUBSTRATE TEMPERATURE ON THE STRUCTURAL PROPERTIES OF ZnO:Al THIN FILM DEPOSITED BY ELECTROSTATIC SPRAY DEPOSITION
نویسنده
چکیده
Zinc Oxide and Al-doped ZnO (AZO) thin films were prepared by Electrostatic spray deposition method on soda lime, glass substrates. The effects of substrate temperatures (300, 350, 400 and 450 C) on the Structural properties of the films were investigated. X-ray diffraction analysis indicates that the films were polycrystalline, having hexagonal (Wurtzite) structure irrespective of their substrate temperature and exhibits a preferred orientation along the (002) plane. The micro structural parameters such as particle size, strain and dislocation density were affected and calculated. The particle size of the AZO was found to be within the range of 70.6 nm to 95.34nm. The thickness of the film decreases with increase in substrate temperature and is within the range of 0.23 to 0.15μm.
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